 หัวเรื่อง:ไม่มีชื่อไทย (ชื่ออังกฤษ : Characterization of Indium Tin Oxide Films after Annealing in Vacuum) ผู้เขียน: Kamon Aiempanakit, Pattana Rakkwamsuk, Supattanapong Dumrongrattana สื่อสิ่งพิมพ์:pdf AbstractITO thin films were deposited on glass substrate by dc magnetron sputtering without substrate heating. The effects of annealing in vacuum on the structural, optical and electrical properties were investigated. The samples of 120 nm ITO films were separately annealed at 200, 250, 300 and 350?C for 1 hour. The results showed that the increasing of the annealing temperatures improve the crystallinity of the films, increase the grain sizes and improve their optical and electrical properties. The optical transmission of films in the visible region increase while in the near infrared region decrease with increasing the annealing temperatures. The relative intensities I(400)/I(222) of ITO films increase but the resistivity decrease with increasing the annealing temperature. The prepared ITO film as-deposited has a resistivity of 2.47?10-3 ?.cm and decreases to 3.95?10-4 ?.cm after annealing at 350?C for 1 hour and energy gap increases from 3.99 eV to 4.10 eV. |
หัวเรื่อง:ไม่มีชื่อไทย (ชื่ออังกฤษ : Fabrication of High-Performance Silver-Based Transparent- Electrode Films on ITO Multilayer Structures) ผู้เขียน:Kamon Aiempanakit, Pattana Rakkwamsuk, Supattanapong Dumrongrattana สื่อสิ่งพิมพ์:pdf AbstractA high-performance transparent-electrode film with a silver-based (Ag) sandwich structure in between an ITO (tin-doped indium oxide) multilayer was deposited on a glass substrate by DC magnetron sputtering at room temperature. The optical and electrical properties of single layers of Ag and of ITO and multilayer structures of ITO/Ag/ITO (S1), ITO/Ag/ITO/Ag/ITO (S2) and ITO/Ag/ITO/Ag/ITO/ Ag/ITO (S3) were investigated by spectrophotometer and four-point probe, respectively. These properties were studied as-deposited and after annealing in a vacuum. It was found that the optical transmittance and the sheet resistance of the Ag film decreased when the film thickness increased. However, the optical transmittance of the Ag film could be enhanced by a sandwich structure composed of ITO/Ag/ ITO. The average optical transmittance in the visible and near infrared range of S1 and S2 decreased when the film systems were annealed in a vacuum. The sheet resistance of S2 was lower than that of S1 and S3 for the as-deposited process, while the sheet resistance of S1 was lower than that of S2 and S3 after annealing in a vacuum. These results depended on the characteristics of the multilayer electrodes and on structural improvements of the Ag and ITO components after annealing the films. |